Summary Abstract: Characterization of AIN films produced by chemical vapor deposition using a novel metal azide precursor

R. K. Schulze, D. R. Mantell, W. L. Gladfelter, J. F. Evans

Research output: Contribution to journalArticlepeer-review

19 Scopus citations
Original languageEnglish (US)
Pages (from-to)2162-2163
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - May 1988

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