| Original language | English (US) |
|---|---|
| Pages (from-to) | 2162-2163 |
| Number of pages | 2 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 6 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 1988 |
Summary Abstract: Characterization of AIN films produced by chemical vapor deposition using a novel metal azide precursor
R. K. Schulze, D. R. Mantell, W. L. Gladfelter, J. F. Evans
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations