Submicron Co(TaC) line array produced by electron-beam direct writing

Y. Zhao, T. J. Zhou, J. P. Wang, J. T.L. Thong, X. F. Yao, T. C. Chong

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The preparation of (Co60C40)97Ta3 and Co60C40 films with thickness 30 nm was performed by cosputtering Co, Ta and C onto C-buffered glass substrates. It was found that the films became magnetic upon annealing. At the same annealing condition, the magnetic performance of annealed (Co60C40)97Ta3 films were better than that of annealed Co60C40 films.

Original languageEnglish (US)
Pages (from-to)7417-7419
Number of pages3
JournalJournal of Applied Physics
Issue number10 2
StatePublished - May 15 2003
Externally publishedYes


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