Projects per year
Abstract
A low-temperature synthesis coupled with mild activation produces zeolite films exhibiting low dielectric constant (low-k) matching the theoretically predicted and experimentally measured values for single crystals. This synthesis and activation method allows for the fabrication of a device consisting of a b-oriented film of the pure-silica zeolite MFI (silicalite-1) supported on a gold-coated silicon wafer. The zeolite seeds are assembled by a manual assembly process and subjected to optimized secondary growth conditions that do not cause corrosion of the gold underlayer, while strongly promoting in-plane growth. The traditional calcination process is replaced with a nonthermal photochemical activation to ensure preservation of an intact gold layer. The dielectric constant (k), obtained through measurement of electrical capacitance in a metal–insulator–metal configuration, highlights the ultralow k ≈ 1.7 of the synthetized films, which is among the lowest values reported for an MFI film. There is large improvement in elastic modulus of the film (E ≈ 54 GPa) over previous reports, potentially allowing for integration into silicon wafer processing technology.
Original language | English (US) |
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Article number | 1700864 |
Journal | Advanced Functional Materials |
Volume | 27 |
Issue number | 25 |
DOIs | |
State | Published - Jul 5 2017 |
Bibliographical note
Publisher Copyright:© 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Keywords
- Dielectrics
- Low-k materials
- Synchrotron X-ray diffraction
- UV treatment
- Zeolites
MRSEC Support
- Shared
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Dive into the research topics of 'Sub-Micrometer Zeolite Films on Gold-Coated Silicon Wafers with Single-Crystal-Like Dielectric Constant and Elastic Modulus'. Together they form a unique fingerprint.Projects
- 3 Finished
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University of Minnesota MRSEC (DMR-1420013)
Lodge, T. P. (PI)
11/1/14 → 10/31/20
Project: Research project
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MRSEC IRG-3: Hierarchical Multifunctional Macromolecular Materials
Reineke, T. M. (Coordinator), Bates, F. S. (Senior Investigator), Dorfman, K. (Senior Investigator), Dutcher, C. S. (Senior Investigator), Hillmyer, M. A. (Senior Investigator), Lodge, T. P. (Senior Investigator), Morse, D. C. (Senior Investigator), Siepmann, I. (Senior Investigator), Barreda, L. (Researcher) & Ganewatta, M. S. (Researcher)
11/1/14 → 10/31/20
Project: Research project
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NMGC: Nanoporous Materials Genome: Methods and Software to Optimize Gas Storage, Separations, and Catalysis (Phase 1)
Siepmann, I. (PI), Cramer, C. (CoI), Gagliardi, L. (CoI), Truhlar, D. G. (CoI), Tsapatsis, M. (CoI) & Goodpaster, J. D. (CoI)
9/1/12 → 8/31/17
Project: Research project