Structure of Atmospheric Pressure Non-Equilibrium Plasmas and Appliacation to Advanced Materials Processing

Tomohiro Nozaki; Ken Okazaki; Joachim Heberlein; Uwe Kortshagen

doi:10.3131/jvsj.47.847

Structure of Atmospheric Pressure Non-Equilibrium Plasmas and Appliacation to Advanced Materials Processing

Tomohiro Nozaki
, Ken Okazaki
, Joachim Heberlein
, Uwe Kortshagen

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	847-853
Number of pages	7
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	47
Issue number	12
DOIs	https://doi.org/10.3131/jvsj.47.847
State	Published - Jan 2004

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title = "Structure of Atmospheric Pressure Non-Equilibrium Plasmas and Appliacation to Advanced Materials Processing",

author = "Tomohiro Nozaki and Ken Okazaki and Joachim Heberlein and Uwe Kortshagen",

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AU - Heberlein, Joachim

AU - Kortshagen, Uwe

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Structure of Atmospheric Pressure Non-Equilibrium Plasmas and Appliacation to Advanced Materials Processing

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