Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

M. C. Robinson; D. J. Morris; P. D. Hayenga; J. H. Cho; C. D. Richards; R. F. Richards; D. F. Bahr

doi:10.1007/s00339-006-3674-1

Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

M. C. Robinson, D. J. Morris, P. D. Hayenga, J. H. Cho, C. D. Richards, R. F. Richards, D. F. Bahr

Electrical and Computer Engineering

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Abstract

Piezoelectric membranes have been fabricated that incorporate a gold bottom electrode with an adhesion layer of titanium-tungsten (10:90 wt.∈%). For solution-deposited acetic acid based lead zirconate titanate (HoAc-PZT) with a Zr:Ti ratio of 40:60, the film's average piezoelectric coefficient, e ₃₁, is -5.31 C/m², with a dielectric constant of 814 at 200 Hz, which is similar to values for platinum bottom electrodes. The PZT structure remains columnar on both types of bottom electrodes. Initial fabrication attempts resulted in cracking that initiated in the PZT layer of the structure. X-ray photoelectron spectroscopy was utilized to establish how processing affects diffusion throughout the composite membrane structure. Crack-free membranes were fabricated and tested. This paper discusses the performance properties and piezoelectric fatigue results for these membranes.

Original language	English (US)
Pages (from-to)	135-140
Number of pages	6
Journal	Applied Physics A: Materials Science and Processing
Volume	85
Issue number	2
DOIs	https://doi.org/10.1007/s00339-006-3674-1
State	Published - Nov 2006

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title = "Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes",

abstract = "Piezoelectric membranes have been fabricated that incorporate a gold bottom electrode with an adhesion layer of titanium-tungsten (10:90 wt.∈%). For solution-deposited acetic acid based lead zirconate titanate (HoAc-PZT) with a Zr:Ti ratio of 40:60, the film's average piezoelectric coefficient, e 31, is -5.31 C/m2, with a dielectric constant of 814 at 200 Hz, which is similar to values for platinum bottom electrodes. The PZT structure remains columnar on both types of bottom electrodes. Initial fabrication attempts resulted in cracking that initiated in the PZT layer of the structure. X-ray photoelectron spectroscopy was utilized to establish how processing affects diffusion throughout the composite membrane structure. Crack-free membranes were fabricated and tested. This paper discusses the performance properties and piezoelectric fatigue results for these membranes.",

author = "Robinson, {M. C.} and Morris, {D. J.} and Hayenga, {P. D.} and Cho, {J. H.} and Richards, {C. D.} and Richards, {R. F.} and Bahr, {D. F.}",

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AU - Robinson, M. C.

AU - Morris, D. J.

AU - Hayenga, P. D.

AU - Cho, J. H.

AU - Richards, C. D.

AU - Richards, R. F.

AU - Bahr, D. F.

PY - 2006/11

Y1 - 2006/11

N2 - Piezoelectric membranes have been fabricated that incorporate a gold bottom electrode with an adhesion layer of titanium-tungsten (10:90 wt.∈%). For solution-deposited acetic acid based lead zirconate titanate (HoAc-PZT) with a Zr:Ti ratio of 40:60, the film's average piezoelectric coefficient, e 31, is -5.31 C/m2, with a dielectric constant of 814 at 200 Hz, which is similar to values for platinum bottom electrodes. The PZT structure remains columnar on both types of bottom electrodes. Initial fabrication attempts resulted in cracking that initiated in the PZT layer of the structure. X-ray photoelectron spectroscopy was utilized to establish how processing affects diffusion throughout the composite membrane structure. Crack-free membranes were fabricated and tested. This paper discusses the performance properties and piezoelectric fatigue results for these membranes.

AB - Piezoelectric membranes have been fabricated that incorporate a gold bottom electrode with an adhesion layer of titanium-tungsten (10:90 wt.∈%). For solution-deposited acetic acid based lead zirconate titanate (HoAc-PZT) with a Zr:Ti ratio of 40:60, the film's average piezoelectric coefficient, e 31, is -5.31 C/m2, with a dielectric constant of 814 at 200 Hz, which is similar to values for platinum bottom electrodes. The PZT structure remains columnar on both types of bottom electrodes. Initial fabrication attempts resulted in cracking that initiated in the PZT layer of the structure. X-ray photoelectron spectroscopy was utilized to establish how processing affects diffusion throughout the composite membrane structure. Crack-free membranes were fabricated and tested. This paper discusses the performance properties and piezoelectric fatigue results for these membranes.

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Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

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