TY - GEN
T1 - Stress mapping sensors for high power adaptive microoptics
AU - Zamali, Mohd Suffian B.
AU - Talghader, Joseph J.
PY - 2005
Y1 - 2005
N2 - Directional stress and temperature effects are simultaneously measured and decoupled in micromachined membrane mirrors using a group of three ion implanted silicon resistors with different orientations. In a demonstration mirror, the sensors show compressive thermal stress changes of about -0.5±0.08 MPa/°C and -0.66±0.09 MPa/°C in the x and y-direction respectively.
AB - Directional stress and temperature effects are simultaneously measured and decoupled in micromachined membrane mirrors using a group of three ion implanted silicon resistors with different orientations. In a demonstration mirror, the sensors show compressive thermal stress changes of about -0.5±0.08 MPa/°C and -0.66±0.09 MPa/°C in the x and y-direction respectively.
UR - https://www.scopus.com/pages/publications/33749075991
UR - https://www.scopus.com/pages/publications/33749075991#tab=citedBy
U2 - 10.1109/OMEMS.2005.1540142
DO - 10.1109/OMEMS.2005.1540142
M3 - Conference contribution
AN - SCOPUS:33749075991
SN - 0780392787
SN - 9780780392786
T3 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
SP - 187
EP - 188
BT - IEEE/LEOS Optical MEMS 2005
T2 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Y2 - 1 August 2005 through 4 August 2005
ER -