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A study of the STEM probe channeling in a heterostructured crystalline bilayer specimens is presented here with a goal to guide STEM-based characterization of multilayer structures. STEM analysis of perovskite BaSnO3/LaAlO3 bilayers is performed and the dominating effects of beam channeling on HAADF- and LAADF-STEM are illustrated. To study the electron beam channeling through BaSnO3/LaAlO3 bilayers, probe intensity depth profiles are calculated, and the effects of probe defocus and atomic column alignment are discussed. Characteristics of the beam channeling are correlated to resulting ADF-STEM images, which is then tested by comparing focal series of plan-view HAADF-STEM images to those recorded experimentally. Additionally, discussions on how to visualize the misfit dislocation network at the BaSnO3/LaAlO3 interface using HAADF- and LAADF-STEM images are provided.
Bibliographical noteFunding Information:
This work is supported in part by SMART , one of seven centers of nCORE, a Semiconductor Research Corporation program, sponsored by National Institute of Standards and Technology (NIST), and by University of Minnesota (UMN) MRSEC program under award no. DMR-1420013 . This work utilized the College of Science and Engineering (CSE) Characterization Facility, UMN, supported in part by the NSF through the UMN MRSEC program. Thin film growth work was supported by the National Science Foundation through DMR- 1741801 , UMN MRSEC program under award no. DMR-1420013 and through the Young Investigator Program of the Air Force Office of Scientific Research (AFOSR) through grant no. FA9550-16- 1-0205 . H. Y. acknowledges a fellowship from the Samsung Scholarship Foundation, Republic of Korea.
- Focal series
How much support was provided by MRSEC?
Reporting period for MRSEC
- Period 6
PubMed: MeSH publication types
- Journal Article