Spatially resolved absolute densities of reactive species and positive ion flux in He-O2 RF-driven atmospheric pressure plasma jet: touching and non-touching with dielectric substrate

Jingkai Jiang, Peter J. Bruggeman

Research output: Contribution to journalArticlepeer-review

Abstract

Atmospheric pressure plasma jets (APPJs) are operating in direct contact with dielectric substrates for many applications. Nonetheless, many studies have been focusing on free jets. In this letter, we report spatially resolved measurements of reactive species including neutral and ionic species in an He + 1% O2 RF-driven APPJ by molecular beam mass spectrometry equipped with a dielectric sampling plate, enabling to detect species densities for APPJ operating remotely or in direct contact with a substrate. The spatially resolved distribution of O, O2(a 1Δg) and O3 is dominated by convection and, remarkably, shows minimum differences between touching and non-touching conditions.

Original languageEnglish (US)
Article number28LT01
JournalJournal of Physics D: Applied Physics
Volume53
Issue number28
DOIs
StatePublished - Jul 8 2020

Keywords

  • ion flux
  • molecular beam mass spectrometer
  • reactive species density
  • touching and non-touching atmospheric pressure plasma jets

Fingerprint Dive into the research topics of 'Spatially resolved absolute densities of reactive species and positive ion flux in He-O<sub>2</sub> RF-driven atmospheric pressure plasma jet: touching and non-touching with dielectric substrate'. Together they form a unique fingerprint.

Cite this