Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study

U. Kortshagen, I. Pukropski, M. Zethoff

Research output: Contribution to journalArticlepeer-review

85 Scopus citations

Fingerprint Dive into the research topics of 'Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study'. Together they form a unique fingerprint.

Physics & Astronomy