Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Fredrik Nikolajeff; Todd A. Ballen; James R. Leger; Anand Gopinath; Tzu Chen Lee; Robert C. Williams

doi:10.1364/AO.38.003030

Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

Fredrik Nikolajeff, Todd A. Ballen, James R. Leger, Anand Gopinath, Tzu Chen Lee, Robert C. Williams

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

Original language	English (US)
Pages (from-to)	3030-3038
Number of pages	9
Journal	Applied Optics
Volume	38
Issue number	14
DOIs	https://doi.org/10.1364/AO.38.003030
State	Published - May 10 1999

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abstract = "Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL{\textquoteright}s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL{\textquoteright}s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.",

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year = "1999",

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AU - Nikolajeff, Fredrik

AU - Ballen, Todd A.

AU - Leger, James R.

AU - Gopinath, Anand

AU - Lee, Tzu Chen

AU - Williams, Robert C.

PY - 1999/5/10

Y1 - 1999/5/10

N2 - Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

AB - Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers VCSEL’s!. The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-mm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

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Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

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