SOME ASPECTS OF QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM.

P. R. Thomas; K. G. Gopinathan; A. Gopinath

SOME ASPECTS OF QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM.

P. R. Thomas, K. G. Gopinathan, A. Gopinath

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A discussion is presented of voltage measurement in the SEM using the retarding grid analyzer for secondary electron energy analysis. A model for the system is proposed and used for the consideration of stability and noise, a description of the sampling system for high-frequency measurements is given, and the problems of measurements through passivation layers are discussed.

Original language	English (US)
Pages (from-to)	479-499
Number of pages	21
Journal	Nuclear Instruments and Methods
State	Published - Jan 1 1980

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title = "SOME ASPECTS OF QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM.",

abstract = "A discussion is presented of voltage measurement in the SEM using the retarding grid analyzer for secondary electron energy analysis. A model for the system is proposed and used for the consideration of stability and noise, a description of the sampling system for high-frequency measurements is given, and the problems of measurements through passivation layers are discussed.",

author = "Thomas, {P. R.} and Gopinathan, {K. G.} and A. Gopinath",

year = "1980",

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AU - Thomas, P. R.

AU - Gopinathan, K. G.

AU - Gopinath, A.

PY - 1980/1/1

Y1 - 1980/1/1

N2 - A discussion is presented of voltage measurement in the SEM using the retarding grid analyzer for secondary electron energy analysis. A model for the system is proposed and used for the consideration of stability and noise, a description of the sampling system for high-frequency measurements is given, and the problems of measurements through passivation layers are discussed.

AB - A discussion is presented of voltage measurement in the SEM using the retarding grid analyzer for secondary electron energy analysis. A model for the system is proposed and used for the consideration of stability and noise, a description of the sampling system for high-frequency measurements is given, and the problems of measurements through passivation layers are discussed.

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M3 - Article

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EP - 499

JO - Nuclear Instruments and Methods

JF - Nuclear Instruments and Methods

ER -

SOME ASPECTS OF QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM.

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