Over the past two decades, extensive research on single-walled carbon nanotubes (SWCNTs) has elucidated their many extraordinary properties, making them one of the most promising candidates for solution-processable, high-performance integrated circuits. In particular, advances in the enrichment of high-purity semiconducting SWCNTs have enabled recent circuit demonstrations including synchronous digital logic, flexible electronics and high-frequency applications. However, due to the stringent requirements of the transistors used in complementary metal-oxide-semiconductor (CMOS) logic as well as the absence of sufficiently stable and spatially homogeneous SWCNT thin-film transistors, the development of large-scale SWCNT CMOS integrated circuits has been limited in both complexity and functionality. Here, we demonstrate the stable and uniform electronic performance of complementary p-type and n-type SWCNT thin-film transistors by controlling adsorbed atmospheric dopants and incorporating robust encapsulation layers. Based on these complementary SWCNT thin-film transistors, we simulate, design and fabricate arrays of low-power static random access memory circuits, achieving large-scale integration for the first time based on solution-processed semiconductors.
Bibliographical noteFunding Information:
This work was supported by the Office of Naval Research MURI Program (N00014-11-1-0690) and the National Science Foundation (DMR-1006391, DMR-1121262 and CCF-0845605). A National Science Foundation Graduate Research Fellowship (M.L.G.) and a NASA Space Technology Research Fellowship (J.J.M.) are also acknowledged. Device fabrication was performed at the NUFAB cleanroom facility at Northwestern University.