In this paper, we report the progress on 3D aerosol deposition of barium titanate (BTO) based multilayer ceramic capacitors (MLCC) using an automated process. Solution-based aerosol deposition is a promising direct-write method to produce three-dimensional (3D) structures at low temperatures. We utilize the combination of solution-based aerosol process and selective laser sintering (SLS) to develop 3D structures. The MLCC structure was synthesized on silicon substrate consisting of alternate layers of 0.5-1.0 μm thick silver electrode layer and 0.5-2 μm thick BTO ceramic. The effect of incident laser power subsequent to deposition (in the range of 105 mW and 930 mW) was systematically investigated revealing the changes in grain morphology as a function of local sintering. The results of this study are promising for development of on-substrate thin/thick film MLCCs.
Bibliographical noteFunding Information:
The authors gratefully acknowledge financial support from NSF INAMM and ONR.
- Aerosol deposition
- Barium titanate
- Laser sintering