Solution-based aerosol deposition process for synthesis of multilayer structures

Christian E. Folgar; Carlos Suchicital; Shashank Priya

doi:10.1016/j.matlet.2011.01.069

Solution-based aerosol deposition process for synthesis of multilayer structures

Christian E. Folgar, Carlos Suchicital, Shashank Priya

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29 Scopus citations

Abstract

In this paper, we report the progress on 3D aerosol deposition of barium titanate (BTO) based multilayer ceramic capacitors (MLCC) using an automated process. Solution-based aerosol deposition is a promising direct-write method to produce three-dimensional (3D) structures at low temperatures. We utilize the combination of solution-based aerosol process and selective laser sintering (SLS) to develop 3D structures. The MLCC structure was synthesized on silicon substrate consisting of alternate layers of 0.5-1.0 μm thick silver electrode layer and 0.5-2 μm thick BTO ceramic. The effect of incident laser power subsequent to deposition (in the range of 105 mW and 930 mW) was systematically investigated revealing the changes in grain morphology as a function of local sintering. The results of this study are promising for development of on-substrate thin/thick film MLCCs.

Original language	English (US)
Pages (from-to)	1302-1307
Number of pages	6
Journal	Materials Letters
Volume	65
Issue number	9
DOIs	https://doi.org/10.1016/j.matlet.2011.01.069
State	Published - May 15 2011
Externally published	Yes

Bibliographical note

Funding Information:
The authors gratefully acknowledge financial support from NSF INAMM and ONR.

Keywords

Aerosol deposition
Barium titanate
Laser sintering
MLCC

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.matlet.2011.01.069

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title = "Solution-based aerosol deposition process for synthesis of multilayer structures",

abstract = "In this paper, we report the progress on 3D aerosol deposition of barium titanate (BTO) based multilayer ceramic capacitors (MLCC) using an automated process. Solution-based aerosol deposition is a promising direct-write method to produce three-dimensional (3D) structures at low temperatures. We utilize the combination of solution-based aerosol process and selective laser sintering (SLS) to develop 3D structures. The MLCC structure was synthesized on silicon substrate consisting of alternate layers of 0.5-1.0 μm thick silver electrode layer and 0.5-2 μm thick BTO ceramic. The effect of incident laser power subsequent to deposition (in the range of 105 mW and 930 mW) was systematically investigated revealing the changes in grain morphology as a function of local sintering. The results of this study are promising for development of on-substrate thin/thick film MLCCs.",

keywords = "Aerosol deposition, Barium titanate, Laser sintering, MLCC",

author = "Folgar, {Christian E.} and Carlos Suchicital and Shashank Priya",

note = "Funding Information: The authors gratefully acknowledge financial support from NSF INAMM and ONR.",

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doi = "10.1016/j.matlet.2011.01.069",

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T1 - Solution-based aerosol deposition process for synthesis of multilayer structures

AU - Folgar, Christian E.

AU - Suchicital, Carlos

AU - Priya, Shashank

N1 - Funding Information: The authors gratefully acknowledge financial support from NSF INAMM and ONR.

PY - 2011/5/15

Y1 - 2011/5/15

N2 - In this paper, we report the progress on 3D aerosol deposition of barium titanate (BTO) based multilayer ceramic capacitors (MLCC) using an automated process. Solution-based aerosol deposition is a promising direct-write method to produce three-dimensional (3D) structures at low temperatures. We utilize the combination of solution-based aerosol process and selective laser sintering (SLS) to develop 3D structures. The MLCC structure was synthesized on silicon substrate consisting of alternate layers of 0.5-1.0 μm thick silver electrode layer and 0.5-2 μm thick BTO ceramic. The effect of incident laser power subsequent to deposition (in the range of 105 mW and 930 mW) was systematically investigated revealing the changes in grain morphology as a function of local sintering. The results of this study are promising for development of on-substrate thin/thick film MLCCs.

AB - In this paper, we report the progress on 3D aerosol deposition of barium titanate (BTO) based multilayer ceramic capacitors (MLCC) using an automated process. Solution-based aerosol deposition is a promising direct-write method to produce three-dimensional (3D) structures at low temperatures. We utilize the combination of solution-based aerosol process and selective laser sintering (SLS) to develop 3D structures. The MLCC structure was synthesized on silicon substrate consisting of alternate layers of 0.5-1.0 μm thick silver electrode layer and 0.5-2 μm thick BTO ceramic. The effect of incident laser power subsequent to deposition (in the range of 105 mW and 930 mW) was systematically investigated revealing the changes in grain morphology as a function of local sintering. The results of this study are promising for development of on-substrate thin/thick film MLCCs.

KW - Aerosol deposition

KW - Barium titanate

KW - Laser sintering

KW - MLCC

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DO - 10.1016/j.matlet.2011.01.069

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SP - 1302

EP - 1307

JO - Materials Letters

JF - Materials Letters

IS - 9

ER -

Solution-based aerosol deposition process for synthesis of multilayer structures

Abstract

Bibliographical note

Keywords

UN SDGs

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