TY - JOUR
T1 - Sol-Gel Synthesis and Characterization of Magnesium Silicate Thin Films
AU - Jones, Steven A.
AU - Wong, Shan
AU - Burlitch, James M.
AU - Viswanathan, Sriram
AU - Kohlstedt, David L.
PY - 1997/11
Y1 - 1997/11
N2 - An H2O2-assisted, sol-gel synthesis route to precursors to magnesium silicate thin films is described. Films having ratios of Mg to Si from 1 to 3 were prepared by spin-coating. On substrates such as silicon, aluminum, steel, glass, and fused silica, repeated coatings were applied, without intermittent treatment, to give ∼0.5 μm thick films. Crack-free consolidation was achieved by conventional or microwave heating. Densification of the films on silicon was studied by IR spectroscopy, ellipsometry, and microhardness measurements; IR analysis indicated that these films were amorphous to at least 750°C. At high enough temperatures, durable films were obtained that exhibited antireflective properties.
AB - An H2O2-assisted, sol-gel synthesis route to precursors to magnesium silicate thin films is described. Films having ratios of Mg to Si from 1 to 3 were prepared by spin-coating. On substrates such as silicon, aluminum, steel, glass, and fused silica, repeated coatings were applied, without intermittent treatment, to give ∼0.5 μm thick films. Crack-free consolidation was achieved by conventional or microwave heating. Densification of the films on silicon was studied by IR spectroscopy, ellipsometry, and microhardness measurements; IR analysis indicated that these films were amorphous to at least 750°C. At high enough temperatures, durable films were obtained that exhibited antireflective properties.
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U2 - 10.1021/cm970401m
DO - 10.1021/cm970401m
M3 - Article
AN - SCOPUS:0343761286
SN - 0897-4756
VL - 9
SP - 2567
EP - 2576
JO - Chemistry of Materials
JF - Chemistry of Materials
IS - 11
ER -