Sol-Gel Synthesis and Characterization of Magnesium Silicate Thin Films

Steven A. Jones, Shan Wong, James M. Burlitch, Sriram Viswanathan, David L. Kohlstedt

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

An H2O2-assisted, sol-gel synthesis route to precursors to magnesium silicate thin films is described. Films having ratios of Mg to Si from 1 to 3 were prepared by spin-coating. On substrates such as silicon, aluminum, steel, glass, and fused silica, repeated coatings were applied, without intermittent treatment, to give ∼0.5 μm thick films. Crack-free consolidation was achieved by conventional or microwave heating. Densification of the films on silicon was studied by IR spectroscopy, ellipsometry, and microhardness measurements; IR analysis indicated that these films were amorphous to at least 750°C. At high enough temperatures, durable films were obtained that exhibited antireflective properties.

Original languageEnglish (US)
Pages (from-to)2567-2576
Number of pages10
JournalChemistry of Materials
Volume9
Issue number11
DOIs
StatePublished - Nov 1997

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