@inproceedings{eb0bdbb2802f4f369b85deef8f1d6abf,
title = "Soft-landing and bounce-back actuation for active stiction control",
abstract = "An electrostatic actuation scheme for creating a soft contact is described and applied to cantilevers and doubly clamped beams. The actuation voltage form is composed of a high voltage pulse with a low dc voltage. The voltage pulse height and duration is mapped for achieving minimum impact force, and the results are well predicted by the simulation. Furthermore, a new phenomenon is observed for clamped beams that pulse longer than the soft-landing requirement bounces the beam back rather than stick.",
keywords = "Electrostatic actuation, Microbeams, Stiction",
author = "Yuyan Wang and Talghader, {Joseph J}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/SENSOR.2007.4300204",
language = "English (US)",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "611--614",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}