Soft-landing and bounce-back actuation for active stiction control

Yuyan Wang, Joseph J Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An electrostatic actuation scheme for creating a soft contact is described and applied to cantilevers and doubly clamped beams. The actuation voltage form is composed of a high voltage pulse with a low dc voltage. The voltage pulse height and duration is mapped for achieving minimum impact force, and the results are well predicted by the simulation. Furthermore, a new phenomenon is observed for clamped beams that pulse longer than the soft-landing requirement bounces the beam back rather than stick.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages611-614
Number of pages4
DOIs
StatePublished - Dec 1 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • Electrostatic actuation
  • Microbeams
  • Stiction

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