Soft-landing and bounce-back actuation for active stiction control

Yuyan Wang; Joseph J Talghader

doi:10.1109/SENSOR.2007.4300204

Soft-landing and bounce-back actuation for active stiction control

Yuyan Wang, Joseph J Talghader

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An electrostatic actuation scheme for creating a soft contact is described and applied to cantilevers and doubly clamped beams. The actuation voltage form is composed of a high voltage pulse with a low dc voltage. The voltage pulse height and duration is mapped for achieving minimum impact force, and the results are well predicted by the simulation. Furthermore, a new phenomenon is observed for clamped beams that pulse longer than the soft-landing requirement bounces the beam back rather than stick.

Original language	English (US)
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	611-614
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300204
State	Published - Dec 1 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country	France
City	Lyon
Period	6/10/07 → 6/14/07

Keywords

Electrostatic actuation
Microbeams
Stiction

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10.1109/SENSOR.2007.4300204

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Wang, Y., & Talghader, J. J. (2007). Soft-landing and bounce-back actuation for active stiction control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 611-614). [4300204] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300204

Soft-landing and bounce-back actuation for active stiction control. / Wang, Yuyan; Talghader, Joseph J.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 611-614 4300204 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, Y & Talghader, JJ 2007, Soft-landing and bounce-back actuation for active stiction control. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300204, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 611-614, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300204

Wang Y, Talghader JJ. Soft-landing and bounce-back actuation for active stiction control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 611-614. 4300204. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300204

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Soft-landing and bounce-back actuation for active stiction control

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