Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography

Wei Xue; Tianhong Cui

Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography

Wei Xue, Tianhong Cui

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe₂O₃) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

Original language	English (US)
Title of host publication	2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Editors	Leland Spangler, Thomas W. Kenny
Publisher	Transducer Research Foundation
Pages	328-331
Number of pages	4
ISBN (Electronic)	0964002469, 9780964002463
State	Published - 2006
Event	13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States Duration: Jun 4 2006 → Jun 8 2006

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Country/Territory	United States
City	Hilton Head Island
Period	6/4/06 → 6/8/06

Bibliographical note

Publisher Copyright:
© 2006 TRF.

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Xue, W., & Cui, T. (2006). Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. In L. Spangler, & T. W. Kenny (Eds.), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 (pp. 328-331). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.

Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. / Xue, Wei; Cui, Tianhong.
2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. ed. / Leland Spangler; Thomas W. Kenny. Transducer Research Foundation, 2006. p. 328-331 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Xue, W & Cui, T 2006, Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. in L Spangler & TW Kenny (eds), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 328-331, 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006, Hilton Head Island, United States, 6/4/06.

Xue W, Cui T. Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. In Spangler L, Kenny TW, editors, 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. Transducer Research Foundation. 2006. p. 328-331. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Xue, Wei ; Cui, Tianhong. / Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. editor / Leland Spangler ; Thomas W. Kenny. Transducer Research Foundation, 2006. pp. 328-331 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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N2 - A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

AB - A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

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Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography

Abstract

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Bibliographical note

UN SDGs

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