Single-crystalline graphene radio-frequency nanoswitches

Peng Li, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Growth of monolayer single-crystalline graphene (SCG) using the low-pressure chemical vapor deposition method is reported. Graphene's superb quality and single-crystalline nature were characterized and verified by Raman microscopy, atomic force microscopy, and carrier mobility measurement. Radio-frequency (RF) nanoelectromechanical switches based on coplanar waveguide double-clamped SCG membrane were achieved, and the superb properties of SCG enable the switches to operate at a pull-in voltage as low as 1 V, with switch time in the nanosecond regime. Owing to their single-crystalline nature, the switches' lifetime (>5000 times) is much longer than that of polycrystalline graphene ones reported. The RF devices exhibit good isolation (-30 dB at 40 GHz (Ka band)), which can be further improved by SCG's conductivity variation due to actuation voltage.

Original languageEnglish (US)
Article number075022
JournalJournal of Micromechanics and Microengineering
Volume25
Issue number7
DOIs
StatePublished - Jul 1 2015

Keywords

  • MEMS
  • RF switch
  • graphene

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