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We present a multi-region extension of power law background subtraction for core-level EEL spectra to improve the robustness of background removal. This method takes advantage of the post-edge shape of core-loss EEL edges to enable simultaneous fitting of pre- and post-edge background regions. This method also produces simultaneous and consistent background removal from multiple edges in a single EEL spectrum. The stability of this method with respect to the fitting energy window and the EELS signal to noise ratio is also discussed.
Bibliographical noteFunding Information:
This work is supported in part by SMART, one of seven centers of nCORE, a Semiconductor Research Corporation program, sponsored by National Institute of Standards and Technology (NIST), and by UMN MRSEC program under award no. DMR-1420013. This work utilized the College of Science and Engineering Characterization Facility, University of Minnesota, supported in part by the NSF through the UMN MRSEC program. H. Y. acknowledges a fellowship from the Samsung Scholarship Foundation, Republic of Korea. J. T. H. acknowledges support from a Doctoral Dissertation Fellowship received from the graduate school at the University of Minnesota.
© 2019 Elsevier B.V.
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