Simulation of flows and contaminant transport in liquid tanks

Y. Wu, T. H. Kuehn, B. Y.H. Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Liquid processing continues to be important in the microelectronics industry. Liquid tanks are used for chemical processing and for cleaning parts. Various tank designs are used but there is very little knowledge of the flow patterns and transport of contaminants in these tanks. This paper reports the development of a simulation technique that can be used to predict the flow due to combined pumping, natural convection and acoustic streaming. The transport of both chemicals and particulate contaminants is included.

Original languageEnglish (US)
Title of host publicationProceedings, Annual Technical Meeting - Institute of Environmental Sciences
Editors Anon
PublisherPubl by Inst of Environmental Sciences
Pages396-406
Number of pages11
ISBN (Print)1877862193
StatePublished - 1993
EventProceedings of the 39th Annual Technical Meeting of Institute of Environmental Sciences - Las Vegas, NV, USA
Duration: May 2 1993May 7 1993

Publication series

NameProceedings, Annual Technical Meeting - Institute of Environmental Sciences
Volume1
ISSN (Print)0073-9227

Other

OtherProceedings of the 39th Annual Technical Meeting of Institute of Environmental Sciences
CityLas Vegas, NV, USA
Period5/2/935/7/93

Fingerprint Dive into the research topics of 'Simulation of flows and contaminant transport in liquid tanks'. Together they form a unique fingerprint.

Cite this