Silicon nanoparticle synthesis using constricted mode capacitive silane plasma

A. Bapat, Ying Dong, C. R. Perrey, C. B. Carter, S. A. Campbell, U. Kortshagen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Crystalline semiconductor nanoparticles are of interest for a variety of electronic and opto-electronic applications. We report experimental studies of the synthesis and characterization of crystalline silicon nanoparticles using a constricted-mode capacitive RF plasma in continuation of results reported earlier from an RF inductively coupled plasma [1]. The constricted-mode discharge is based on a thermal plasma instability yielding a high-density plasma filament, which rotates at a high frequency. Silane is dissociated, leading to particle nucleation and growth. Particles are extracted by passing the particle-laden gas through an orifice to form a beam and collected by inertial impaction. We are able to reproducibly synthesize highly oriented freestanding single-crystal silicon nanoparticles. Monodisperse particle size distributions centered at a 35nm particle diameter with a geometric standard deviation of 1.3 are obtained. Transmission electron microscope (TEM) studies show uniformly shaped cubic particles. Selected-area electron diffraction patterns indicate the particles have the diamond-cubic silicon structure. To study the electrical properties of these particles, metal-semiconductor-metal structures were fabricated and analyzed.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsO.J. Glembocki, C.E. Hunt
Pages405-410
Number of pages6
Volume818
StatePublished - 2004
EventNanoparticles and Nanowire Building Blocks - Synthesis, Processing, Characterization and Theory - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

Other

OtherNanoparticles and Nanowire Building Blocks - Synthesis, Processing, Characterization and Theory
CountryUnited States
CitySan Francisco, CA
Period4/13/044/16/04

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