Keyphrases
Silicon Surface
100%
Silane
100%
Silicon Hydride
100%
A-Si
100%
Dianhydride
100%
Hydrogenated Amorphous Silicon Films
100%
Nc-Si
100%
Hydrogenated Microcrystalline Silicon Film
100%
Monohydrides
100%
Vibrational Frequencies
66%
Dangling Bonds
66%
H2O Dilution
66%
In Situ
33%
Dissociation Rate
33%
Resonant Frequency
33%
Surface Coverage
33%
Absorption Lines
33%
Film Surface
33%
H-abstraction
33%
Attenuated Total reflectance-Fourier Transform Infrared Spectroscopy (ATR-FTIR)
33%
Hydrides
33%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
33%
Si(100) Surface
33%
Si(111)
33%
Surface Matching
33%
Hydrogen Bonds (H-bonds)
33%
SiH3
33%
Material Science
Amorphous Silicon
100%
Silicon
100%
Film
100%
Hydride
100%
Surface (Surface Science)
100%
Nanocrystalline Silicon
100%
Dilution
16%
Plasma-Enhanced Chemical Vapor Deposition
8%
Fourier Transform Infrared Spectroscopy
8%