Sensitive Membrane Resonator Sensor for Sub-Micron Diameter Particle Counting

A. Jaafar, Z. Liu, X. Jiang, D. Struk, P. J. Hesketh, F. Ayazi, A. Ojha, C. Hogan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes a sensitive method for particle sensing using a high-order membrane resonator operating at 9.5 MHz. The design makes use of AlN piezoelectric film with a supported disk geometry to provide isolation of the electrical contacts. The frequency shifts measured with known particle deposition are based on a thermophoretic separator. The particle mass flux calculation using the thermophoretic separator are 4.98×10-8 and 8.24×10-8 mg/mm2 which was achieved at 50 oC and 70 oC respectively. The sensitivity observed for 50-200 nm diameter particles was 0.9 Hz frequency shift correlating to a 69 fg mass change at 50 oC, and a 1.2 Hz frequency shift correlating to a 92 fg mass change at 70 oC, compared to a theoretical mass sensitivity of 13Hz/pg.

Original languageEnglish (US)
Title of host publicationISOEN 2024 - International Symposium on Olfaction and Electronic Nose, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350348651
StatePublished - 2024
Externally publishedYes
Event2024 IEEE International Symposium on Olfaction and Electronic Nose, ISOEN 2024 - Grapevine, United States
Duration: May 12 2024May 15 2024

Publication series

NameISOEN 2024 - International Symposium on Olfaction and Electronic Nose, Proceedings

Conference

Conference2024 IEEE International Symposium on Olfaction and Electronic Nose, ISOEN 2024
Country/TerritoryUnited States
CityGrapevine
Period5/12/245/15/24

Bibliographical note

Publisher Copyright:
©2024 IEEE.

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