Abstract
This paper describes a sensitive method for particle sensing using a high-order membrane resonator operating at 9.5 MHz. The design makes use of AlN piezoelectric film with a supported disk geometry to provide isolation of the electrical contacts. The frequency shifts measured with known particle deposition are based on a thermophoretic separator. The particle mass flux calculation using the thermophoretic separator are 4.98×10-8 and 8.24×10-8 mg/mm2 which was achieved at 50 oC and 70 oC respectively. The sensitivity observed for 50-200 nm diameter particles was 0.9 Hz frequency shift correlating to a 69 fg mass change at 50 oC, and a 1.2 Hz frequency shift correlating to a 92 fg mass change at 70 oC, compared to a theoretical mass sensitivity of 13Hz/pg.
Original language | English (US) |
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Title of host publication | ISOEN 2024 - International Symposium on Olfaction and Electronic Nose, Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9798350348651 |
State | Published - 2024 |
Externally published | Yes |
Event | 2024 IEEE International Symposium on Olfaction and Electronic Nose, ISOEN 2024 - Grapevine, United States Duration: May 12 2024 → May 15 2024 |
Publication series
Name | ISOEN 2024 - International Symposium on Olfaction and Electronic Nose, Proceedings |
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Conference
Conference | 2024 IEEE International Symposium on Olfaction and Electronic Nose, ISOEN 2024 |
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Country/Territory | United States |
City | Grapevine |
Period | 5/12/24 → 5/15/24 |
Bibliographical note
Publisher Copyright:©2024 IEEE.