Self-assembly of orthogonal three-axis sensors

J. H. Cho, S. Hu, D. H. Gracias

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Abstract

Conventional planar microfabrication is widely utilized to construct sensors for the measurement of physical or chemical properties. However, in these devices, the information component measured is typically restricted to only one vectorial axis. Here, we describe a self-assembling strategy that can be utilized to construct three dimensional (3D) cubic devices that facilitate measurement along three axes. This 3D measurement is achieved by arranging sensing elements orthogonally; any sensing element that can be lithographically patterned can be utilized. The 3D arrangement of sensors allows for the measurement of angular and orientation parameters. As an example, we describe a three-axis cantilever based sensor and demonstrate measurement of an evaporated analyte using resonant frequency shifts of cantilevers in each of the x, y, and z axes.

Original languageEnglish (US)
Article number043505
JournalApplied Physics Letters
Volume93
Issue number4
DOIs
StatePublished - Aug 15 2008

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