Selective epitaxial growth of silicon layer using batch-type equipment for vertical diode application for next generation memories

Kong Soo Lee, Dae Han Yoo, Young Sub Yoo, Jae Jong Han, Seok Sik Kim, Hong Sik Jeong, Chang Jin Kang, Joo Tae Moon, Hyunho Park, Hanwook Jeong, Kwang Ryul Kim, Byoungdeog Choi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution