Seed-induced crystallization of amorphous silicon for the formation of large-grain poly-crystalline silicon

Jason Trask, Lin Cui, Andrew J. Wagner, K. Andre Mkhoyan, Uwe Kortshagen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new method for reducing crystallization time of hydrogenated amorphous silicon thin films and more successfully controlling grain structure has been studied through seeding of the bulk matrix with nanocrystallites during film deposition. Films were deposited by a system in which crystallites and amorphous film were synthesized in separate RF-powered plasmas. Average crystallite size was confirmed to be 20 to 50 nm via TEM imaging. Several films with various initial crystallite population densities were produced, and their crystallization kinetics were studied via Raman spectroscopy throughout a staged annealing process. Seeded films consistently displayed a characteristic crystallization time less than the incubation time of unseeded control films. Furthermore, films with larger initial seed densities exhibited earlier crystallization onset. A separate study also was performed in which the dark conductivity was compared between films re-crystallized from various initial seed densities.

Original languageEnglish (US)
Title of host publicationASME 2010 4th International Conference on Energy Sustainability, ES 2010
Pages467-470
Number of pages4
DOIs
StatePublished - Dec 1 2010
EventASME 2010 4th International Conference on Energy Sustainability, ES 2010 - Phoenix, AZ, United States
Duration: May 17 2010May 22 2010

Publication series

NameASME 2010 4th International Conference on Energy Sustainability, ES 2010
Volume2

Other

OtherASME 2010 4th International Conference on Energy Sustainability, ES 2010
CountryUnited States
CityPhoenix, AZ
Period5/17/105/22/10

Fingerprint Dive into the research topics of 'Seed-induced crystallization of amorphous silicon for the formation of large-grain poly-crystalline silicon'. Together they form a unique fingerprint.

  • Cite this

    Trask, J., Cui, L., Wagner, A. J., Mkhoyan, K. A., & Kortshagen, U. (2010). Seed-induced crystallization of amorphous silicon for the formation of large-grain poly-crystalline silicon. In ASME 2010 4th International Conference on Energy Sustainability, ES 2010 (pp. 467-470). (ASME 2010 4th International Conference on Energy Sustainability, ES 2010; Vol. 2). https://doi.org/10.1115/ES2010-90443