Scanning Laser Acoustic Microscope Using Surface Acoustic Waves and Digital Image Processing

R. K. Mueller, W. P. Robbins

Research output: Contribution to journalConference articlepeer-review


The operation of a scanning laser acoustic microscope which utilizes surface acoustic waves (currently at 100 MHz) is described. The microscope has the capability to digitize both the acoustic information and optical image and store them to disk for subsequent image processing. The image processing algorithms which take the acoustic displacement at the surface of the sample as input and invert th". wave equation to produce an acoustic image of either the wave number or velocity versus position is described. Test features (phantoms) composed of thin metal film structures of varying lateral dimensions and thickness have been fabricated on YZ lithium niobate SAW delay lines. These test samples have been used in the microscope and acoustic images of the "known" features have been acquired by the system.

Original languageEnglish (US)
Article number1535301
Pages (from-to)561-566
Number of pages6
JournalProceedings - IEEE Ultrasonics Symposium
StatePublished - 1984
Event1984 IEEE Ultrasonics Symposium, IUS 1984 - Dallas, United States
Duration: Nov 14 1984Nov 16 1984

Bibliographical note

Funding Information:
This research was partially supported by the Semiconductor Research Corporation (contract # 83-01-024) and by the nept. of Energy through the University of Minnesota Corrosion Research Center (DOE grant # DOE/OE-AC02-79ERlO450).

Publisher Copyright:
© 1984 IEEE.


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