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Sb-mediated growth of n- and p-type AlGaAs by molecular beam epitaxy

  • S. R. Johnson
  • , Yu G. Sadofyev
  • , D. Ding
  • , Y. Cao
  • , S. A. Chaparro
  • , K. Franzreb
  • , Y. H. Zhang

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1436-1440
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
DOIs
StatePublished - 2004
Externally publishedYes

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