@article{d80a9519ef5a425a84055fe9a504c817,
title = "Sb-mediated growth of n- and p-type AlGaAs by molecular beam epitaxy",
author = "Johnson, \{S. R.\} and Sadofyev, \{Yu G.\} and D. Ding and Y. Cao and Chaparro, \{S. A.\} and K. Franzreb and Zhang, \{Y. H.\}",
year = "2004",
doi = "10.1116/1.1705579",
language = "English (US)",
volume = "22",
pages = "1436--1440",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "3",
}