Sampling-mode scanning electron microscope for probing fast voltage waveforms

K. G. Gopinathan; P. R. Thomas; A. Gopinath; A. R. Owens

doi:10.1049/el:19760380

Sampling-mode scanning electron microscope for probing fast voltage waveforms

K. G. Gopinathan, P. R. Thomas, A. Gopinath, A. R. Owens

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10^-11 A for a 12·5 kV beam and a settling time of 30 ms.

Original language	English (US)
Pages (from-to)	501-502
Number of pages	2
Journal	Electronics Letters
Volume	12
Issue number	19
DOIs	https://doi.org/10.1049/el:19760380
State	Published - Sep 16 1976

Keywords

Electron microscopes
Voltage measurements

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10.1049/el:19760380

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@article{1aa6f2ab8bb0478090138efc3d7ba0f7,

title = "Sampling-mode scanning electron microscope for probing fast voltage waveforms",

abstract = "Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.",

keywords = "Electron microscopes, Voltage measurements",

author = "Gopinathan, \{K. G.\} and Thomas, \{P. R.\} and A. Gopinath and Owens, \{A. R.\}",

year = "1976",

month = sep,

day = "16",

doi = "10.1049/el:19760380",

language = "English (US)",

volume = "12",

pages = "501--502",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley \& Sons Inc.",

number = "19",

}

TY - JOUR

T1 - Sampling-mode scanning electron microscope for probing fast voltage waveforms

AU - Gopinathan, K. G.

AU - Thomas, P. R.

AU - Gopinath, A.

AU - Owens, A. R.

PY - 1976/9/16

Y1 - 1976/9/16

N2 - Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.

AB - Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.

KW - Electron microscopes

KW - Voltage measurements

UR - https://www.scopus.com/pages/publications/84943676302

UR - https://www.scopus.com/inward/citedby.url?scp=84943676302&partnerID=8YFLogxK

U2 - 10.1049/el:19760380

DO - 10.1049/el:19760380

M3 - Article

AN - SCOPUS:84943676302

SN - 0013-5194

VL - 12

SP - 501

EP - 502

JO - Electronics Letters

JF - Electronics Letters

IS - 19

ER -

Sampling-mode scanning electron microscope for probing fast voltage waveforms

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Keywords

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