Sampling-mode scanning electron microscope for probing fast voltage waveforms

K. G. Gopinathan, P. R. Thomas, A. Gopinath, A. R. Owens

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.

Original languageEnglish (US)
Pages (from-to)501-502
Number of pages2
JournalElectronics Letters
Volume12
Issue number19
DOIs
StatePublished - Sep 16 1976

Keywords

  • Electron microscopes
  • Voltage measurements

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