Sampling-mode scanning electron microscope for probing fast voltage waveforms

K. G. Gopinathan; P. R. Thomas; A. Gopinath; A. R. Owens

doi:10.1049/el:19760380

Sampling-mode scanning electron microscope for probing fast voltage waveforms

K. G. Gopinathan, P. R. Thomas, A. Gopinath, A. R. Owens

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10^-11 A for a 12·5 kV beam and a settling time of 30 ms.

Original language	English (US)
Pages (from-to)	501-502
Number of pages	2
Journal	Electronics Letters
Volume	12
Issue number	19
DOIs	https://doi.org/10.1049/el:19760380
State	Published - Sep 16 1976

Keywords

Electron microscopes
Voltage measurements

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10.1049/el:19760380

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title = "Sampling-mode scanning electron microscope for probing fast voltage waveforms",

abstract = "Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.",

keywords = "Electron microscopes, Voltage measurements",

author = "Gopinathan, {K. G.} and Thomas, {P. R.} and A. Gopinath and Owens, {A. R.}",

year = "1976",

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T1 - Sampling-mode scanning electron microscope for probing fast voltage waveforms

AU - Gopinathan, K. G.

AU - Thomas, P. R.

AU - Gopinath, A.

AU - Owens, A. R.

PY - 1976/9/16

Y1 - 1976/9/16

N2 - Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.

AB - Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.

KW - Electron microscopes

KW - Voltage measurements

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JF - Electronics Letters

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ER -

Sampling-mode scanning electron microscope for probing fast voltage waveforms

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