Abstract
Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage waveforms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10-11 A for a 12·5 kV beam and a settling time of 30 ms.
Original language | English (US) |
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Pages (from-to) | 501-502 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 12 |
Issue number | 19 |
DOIs | |
State | Published - Sep 16 1976 |
Keywords
- Electron microscopes
- Voltage measurements