RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr 1-xTix)O3 film and surface micromachining

Y. S. Yoon, J. H. Kim, A. M. Schimidt, D. L. Polla, Q. Wang, W. L. Gladfelter, Y. H. Shin

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