RHEED STREAKS AND INSTRUMENT RESPONSE.

J. M. Van Hove, P. Pukite, P. I. Cohen

Research output: Contribution to journalConference articlepeer-review

32 Scopus citations

Abstract

Reflection high-energy electron diffraction (RHEED) is so sensitive to surface morphology that it is difficult to separate the roles of instrument response and surface imperfection in the diffraction. To address this difficulty the authors have used MBE grown GaAs(001) as a test surface to study the angular dimensions of the diffracted beams. This is important if RHEED is to be useful as a quantitive probe of surface structure for in situ studies of crystal growth. The limitations placed by instrumental uncertainties on the maximum resolvable distance are estimated. Measurements of instrumental uncertainties on the maximum resolvable distance are estimated. Measurements of the angular length of the RHEED streaks versus angle of incidence are presented which show the changes expected from a combination of a uniformly broadened reciprocal lattice rod and an instrument limit due to angular uncertainties. Resolvable distances are obtained with RHEED that are much larger than those typically obtained with low-energy electron diffraction.

Original languageEnglish (US)
Pages (from-to)609-613
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume1
Issue number2 pt 1
DOIs
StatePublished - Jan 1 1982
Externally publishedYes
EventProc of the Natl Symp of the AVS, 29th - Baltimore, Md, USA
Duration: Nov 16 1982Nov 19 1982

Fingerprint Dive into the research topics of 'RHEED STREAKS AND INSTRUMENT RESPONSE.'. Together they form a unique fingerprint.

Cite this