Abstract
Growth of monolayer single-crystalline graphene using low pressure chemical vapor deposition (LPCVD) method is reported. Radio frequency (RF) nano switches based on coplanar waveguide double-clamped single-crystalline graphene membrane was achieved for the first time. Owing to the single crystalline nature, its life time (> 5000 times) is much longer than polycrystalline graphene (PCG) switches (4-5 times [1]). It exhibits small pull-in voltage (∼1 V) and superb signal isolation (c30 dB at 40 GHz) which can be further improved by graphene's unique electric field effect.
Original language | English (US) |
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Title of host publication | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 307-310 |
Number of pages | 4 |
ISBN (Electronic) | 9781479989553 |
DOIs | |
State | Published - Aug 5 2015 |
Event | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015 |
Publication series
Name | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
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Other
Other | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
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Country/Territory | United States |
City | Anchorage |
Period | 6/21/15 → 6/25/15 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Graphene
- RF switch
- radio frequency
- single crystalline