TY - JOUR
T1 - Reliability of double probe measurements in nanodusty plasmas
AU - Xiong, Zichang
AU - Held, Julian
AU - Kortshagen, Uwe
N1 - Publisher Copyright:
© 2023 The Author(s). Published by IOP Publishing Ltd.
PY - 2023/3
Y1 - 2023/3
N2 - Nonthermal plasmas are attractive sources for nanoparticles synthesis, however, their plasma properties are notoriously difficult to assess due to the chemically reactive environment and high nanoparticle concentrations. Here, we are using a floating double probe to measure the plasma properties of a nanoparticle-forming argon:silane plasma. We demonstrate good stability of current-voltage characteristics over several minutes of operation. However, unexpectedly larger electron temperatures are measured with increasing the silane mole fraction. To test the validity of these results, we developed a zero-dimensional global model to investigate the effect of the presence of nanoparticles on the plasma properties. Using this model, we show that increasing particle concentration leads to an increasing electronegativity of the plasma, causing an increase of the reduced electric field. However, this causes only a moderate increase in mean electron energy, in contrast to the much larger increase measured by the double probe. We argue that these large electron temperatures are based on the fact that a double probe measures an ‘apparent’ electron temperature, which is defined by the negative inverse slope of the logarithm of the electron energy probability function (EEPF) at an energy corresponding to the probe’s floating potential. As the silane mole fraction is increased, the plasma becomes more electronegative and the probe’s floating potential moves closer to the plasma potential. Combined with the strong non-Maxwellian EEPF, this leads to the large apparent electron temperatures obtained by the probe. Thus, the apparent electron temperatures measured with the double probe do not follow the trends in mean electron energy.
AB - Nonthermal plasmas are attractive sources for nanoparticles synthesis, however, their plasma properties are notoriously difficult to assess due to the chemically reactive environment and high nanoparticle concentrations. Here, we are using a floating double probe to measure the plasma properties of a nanoparticle-forming argon:silane plasma. We demonstrate good stability of current-voltage characteristics over several minutes of operation. However, unexpectedly larger electron temperatures are measured with increasing the silane mole fraction. To test the validity of these results, we developed a zero-dimensional global model to investigate the effect of the presence of nanoparticles on the plasma properties. Using this model, we show that increasing particle concentration leads to an increasing electronegativity of the plasma, causing an increase of the reduced electric field. However, this causes only a moderate increase in mean electron energy, in contrast to the much larger increase measured by the double probe. We argue that these large electron temperatures are based on the fact that a double probe measures an ‘apparent’ electron temperature, which is defined by the negative inverse slope of the logarithm of the electron energy probability function (EEPF) at an energy corresponding to the probe’s floating potential. As the silane mole fraction is increased, the plasma becomes more electronegative and the probe’s floating potential moves closer to the plasma potential. Combined with the strong non-Maxwellian EEPF, this leads to the large apparent electron temperatures obtained by the probe. Thus, the apparent electron temperatures measured with the double probe do not follow the trends in mean electron energy.
KW - double probe
KW - dusty plasma
KW - electronegativity
KW - elevated electron temperature
KW - nanoparticles
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U2 - 10.1088/1361-6595/acbcef
DO - 10.1088/1361-6595/acbcef
M3 - Article
AN - SCOPUS:85149981282
SN - 0963-0252
VL - 32
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 3
M1 - 035001
ER -