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Recent Progress in the Analysis of Electromigration and Stress Migration in Large Multisegment Interconnects

  • Nestor Evmorfopoulos
  • , Mohammad Abdullah Al Shohel
  • , Olympia Axelou
  • , Pavlos Stoikos
  • , Vidya A. Chhabria
  • , Sachin S. Sapatnekar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Traditional approaches to analyzing electromigration (EM) in on-chip interconnects are largely driven by semi-empirical models. However, such methods are inexact for the typical multisegment lines that are found in modern integrated circuits. This paper overviews recent advances in analyzing EM in on-chip interconnect structures based on physics-based models that use partial differential equations, with appropriate boundary conditions, to capture the impact of electron-wind and back-stress forces within an interconnect, across multiple wire segments. Methods for both steady-state and transient analysis are presented, highlighting approaches that can solve these problems with a computation time that is linear in the number of wire segments in the interconnect.

Original languageEnglish (US)
Title of host publicationISPD 2023 - Proceedings of the 2023 International Symposium on Physical Design
PublisherAssociation for Computing Machinery
Pages115-123
Number of pages9
ISBN (Electronic)9781450399784
DOIs
StatePublished - Mar 26 2023
Event32nd ACM International Symposium on Physical Design, ISPD 2023 - Virtual, Online, United States
Duration: Mar 26 2023Mar 29 2023

Publication series

NameProceedings of the 2023 International Symposium on Physical Design

Conference

Conference32nd ACM International Symposium on Physical Design, ISPD 2023
Country/TerritoryUnited States
CityVirtual, Online
Period3/26/233/29/23

Bibliographical note

Funding Information:
This paper has presented a summary of recent computationally efficient physics-based approaches to solving the problem of EM analysis of multisegment interconnect wires. Solutions to both the steady-state problem, used to identify immortal wires, and the transient problem, which determines stress evolution as a function of time, are presented. Based on the resurgence of interest in this area, its importance to modern chip design, and the development of fast, linear-time approaches for solving these problems, we anticipate significant developments in this area in the near future. An open question remains as to how physics-based methods can interact with foundry models. This is a topic for future investigation. Acknowledgments: This work was supported in part by the National Science Foundation under award 1714805 and by SPAWAR under contract N660011824048.

Publisher Copyright:
© 2023 ACM.

Keywords

  • Electromigration
  • Multisegment interconnects
  • Reliability
  • Steady-state analysis
  • Stress
  • Transient analysis

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