Abstract
Traditional approaches to analyzing electromigration (EM) in on-chip interconnects are largely driven by semi-empirical models. However, such methods are inexact for the typical multisegment lines that are found in modern integrated circuits. This paper overviews recent advances in analyzing EM in on-chip interconnect structures based on physics-based models that use partial differential equations, with appropriate boundary conditions, to capture the impact of electron-wind and back-stress forces within an interconnect, across multiple wire segments. Methods for both steady-state and transient analysis are presented, highlighting approaches that can solve these problems with a computation time that is linear in the number of wire segments in the interconnect.
Original language | English (US) |
---|---|
Title of host publication | ISPD 2023 - Proceedings of the 2023 International Symposium on Physical Design |
Publisher | Association for Computing Machinery |
Pages | 115-123 |
Number of pages | 9 |
ISBN (Electronic) | 9781450399784 |
DOIs | |
State | Published - Mar 26 2023 |
Event | 32nd ACM International Symposium on Physical Design, ISPD 2023 - Virtual, Online, United States Duration: Mar 26 2023 → Mar 29 2023 |
Publication series
Name | Proceedings of the 2023 International Symposium on Physical Design |
---|
Conference
Conference | 32nd ACM International Symposium on Physical Design, ISPD 2023 |
---|---|
Country/Territory | United States |
City | Virtual, Online |
Period | 3/26/23 → 3/29/23 |
Bibliographical note
Funding Information:This paper has presented a summary of recent computationally efficient physics-based approaches to solving the problem of EM analysis of multisegment interconnect wires. Solutions to both the steady-state problem, used to identify immortal wires, and the transient problem, which determines stress evolution as a function of time, are presented. Based on the resurgence of interest in this area, its importance to modern chip design, and the development of fast, linear-time approaches for solving these problems, we anticipate significant developments in this area in the near future. An open question remains as to how physics-based methods can interact with foundry models. This is a topic for future investigation. Acknowledgments: This work was supported in part by the National Science Foundation under award 1714805 and by SPAWAR under contract N660011824048.
Publisher Copyright:
© 2023 ACM.
Keywords
- Electromigration
- Multisegment interconnects
- Reliability
- Steady-state analysis
- Stress
- Transient analysis