Recent developments in porous silicon substrates for RF/microwave applications

Keyphrases

• Modification Methods 100%
• Silicon Substrate 100%
• Porous Silicon 100%
• Substrate Modification 100%
• Microwave Applications 100%
• Oxides 50%
• Dielectric 50%
• SiGe 50%
• Passive House 50%
• Electrical Characterization 50%
• Circuit Performance 50%
• Volume Production 50%
• Lumped Elements 50%
• Potential Cost Savings 50%
• Characterization Data 50%
• Highly Integrated 50%
• RF Circuits 50%
• Packaging Performance 50%
• Active Circuits 50%
• Silicon Material 50%
• BiCMOS 50%
• Integrated System Design 50%
• Active Packaging 50%
• Low Resistivity Silicon 50%
• Active Design 50%
• High-resistivity Silicon (HR-Si) 50%

Engineering

• Silicon Substrate 100%
• Porous Silicon 100%
• Dielectrics 50%
• Conductive 50%
• Interconnects 50%
• Active Element 50%
• Silicon Material 50%
• Passive Design 50%
• Integrated System 50%

Material Science

• Silicon 100%
• Microwave Technology 100%
• Porous Silicon 100%
• Electronic Circuit 66%
• Dielectric Material 33%
• Electrical Resistivity 33%
• Silicon Material 33%
• Oxide Compound 33%