Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution

L. M. Belova; Olav Hellwig; Elizabeth Dobisz; E. Dan Dahlberg

doi:10.1063/1.4752225

Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution

L. M. Belova, Olav Hellwig, Elizabeth Dobisz, E. Dan Dahlberg

Physics and Astronomy (Twin Cities)

Research output: Contribution to journal › Review article › peer-review

37 Scopus citations

Abstract

Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co ₂(CO) ₈ gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.

Original language	English (US)
Article number	093711
Journal	Review of Scientific Instruments
Volume	83
Issue number	9
DOIs	https://doi.org/10.1063/1.4752225
State	Published - Sep 2012

Bibliographical note

Funding Information:
This work was supported by the Swedish Foundation for Strategic Research and the MRSEC Program of the National Science Foundation under Award No. DMR-0819885.

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10.1063/1.4752225

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@article{4edffb02f6a94ca68d15859325669c97,

title = "Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution",

abstract = "Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co 2(CO) 8 gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.",

author = "Belova, {L. M.} and Olav Hellwig and Elizabeth Dobisz and {Dan Dahlberg}, E.",

note = "Funding Information: This work was supported by the Swedish Foundation for Strategic Research and the MRSEC Program of the National Science Foundation under Award No. DMR-0819885.",

year = "2012",

month = sep,

doi = "10.1063/1.4752225",

language = "English (US)",

volume = "83",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "9",

}

TY - JOUR

T1 - Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution

AU - Belova, L. M.

AU - Hellwig, Olav

AU - Dobisz, Elizabeth

AU - Dan Dahlberg, E.

N1 - Funding Information: This work was supported by the Swedish Foundation for Strategic Research and the MRSEC Program of the National Science Foundation under Award No. DMR-0819885.

PY - 2012/9

Y1 - 2012/9

N2 - Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co 2(CO) 8 gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.

AB - Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co 2(CO) 8 gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.

UR - http://www.scopus.com/inward/record.url?scp=84866980746&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84866980746&partnerID=8YFLogxK

U2 - 10.1063/1.4752225

DO - 10.1063/1.4752225

M3 - Review article

AN - SCOPUS:84866980746

SN - 0034-6748

VL - 83

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 9

M1 - 093711

ER -

Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution

Abstract

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