Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution

L. M. Belova, Olav Hellwig, Elizabeth Dobisz, E. Dan Dahlberg

Research output: Contribution to journalReview article

29 Scopus citations

Abstract

Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co 2(CO) 8 gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.

Original languageEnglish (US)
Article number093711
JournalReview of Scientific Instruments
Volume83
Issue number9
DOIs
StatePublished - Sep 1 2012

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