Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation

Xiaomei Wang, James R. Leger, Robert H. Rediker

Research output: Contribution to journalArticlepeer-review

47 Scopus citations

Abstract

We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a single laser pulse. Multiple pulses are used to vary the ablation depth, and multiple patterns are used to create a variety of multilevel optics. We have successfully fabricated arrays of eight-level diffractive microlenses with varying focal lengths and decenters. The optics performed with diffraction-limited focusing and neartheoretical diffraction efficiency (92%).

Original languageEnglish (US)
Pages (from-to)4660-4665
Number of pages6
JournalApplied Optics
Volume36
Issue number20
DOIs
StatePublished - Jul 10 1997

Keywords

  • Ablation
  • Binary optics
  • Diffractive optics
  • Excimer laser
  • Laser machining
  • Micro-optics
  • Microlenses

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