Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

V. Ng; J. F. Hu; A. O. Adeyeye; J. P. Wang; T. C. Chong

doi:10.1016/S0304-8853(02)00292-5

Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

V. Ng, J. F. Hu, A. O. Adeyeye, J. P. Wang, T. C. Chong

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni₈₀Fe₂₀ thin film as an underlayer. The surface roughness of Ni₈₀Fe₂₀ thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni₈₀Fe₂₀ underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni₈₀Fe₂₀/Al/Co/Al and Si/Ni₈₀Fe₂₀/Al/Co/Al₂O₃/Ni₈₀Fe₂₀/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.

Original language	English (US)
Pages (from-to)	339-344
Number of pages	6
Journal	Journal of Magnetism and Magnetic Materials
Volume	247
Issue number	3
DOIs	https://doi.org/10.1016/S0304-8853(02)00292-5
State	Published - 2002

Bibliographical note

Funding Information:
The authors would like to thank colleagues in DSI and ISML for discussions and help in the experiments. J.F. Hu was supported by an NUS postgraduate student scholarship.

Keywords

Magnetic thin films
Multilayers
Substrate bias
Surface roughness

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10.1016/S0304-8853(02)00292-5

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title = "Radio frequency substrate bias effect on properties of Co thin film and multilayer structures",

abstract = "This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni80Fe20 thin film as an underlayer. The surface roughness of Ni80Fe20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni80Fe20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni80Fe20/Al/Co/Al and Si/Ni80Fe20/Al/Co/Al2O3/Ni80Fe20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.",

keywords = "Magnetic thin films, Multilayers, Substrate bias, Surface roughness",

author = "V. Ng and Hu, {J. F.} and Adeyeye, {A. O.} and Wang, {J. P.} and Chong, {T. C.}",

note = "Funding Information: The authors would like to thank colleagues in DSI and ISML for discussions and help in the experiments. J.F. Hu was supported by an NUS postgraduate student scholarship. ",

year = "2002",

doi = "10.1016/S0304-8853(02)00292-5",

language = "English (US)",

volume = "247",

pages = "339--344",

journal = "Journal of Magnetism and Magnetic Materials",

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TY - JOUR

T1 - Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

AU - Ng, V.

AU - Hu, J. F.

AU - Adeyeye, A. O.

AU - Wang, J. P.

AU - Chong, T. C.

N1 - Funding Information: The authors would like to thank colleagues in DSI and ISML for discussions and help in the experiments. J.F. Hu was supported by an NUS postgraduate student scholarship.

PY - 2002

Y1 - 2002

N2 - This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni80Fe20 thin film as an underlayer. The surface roughness of Ni80Fe20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni80Fe20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni80Fe20/Al/Co/Al and Si/Ni80Fe20/Al/Co/Al2O3/Ni80Fe20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.

AB - This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni80Fe20 thin film as an underlayer. The surface roughness of Ni80Fe20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni80Fe20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni80Fe20/Al/Co/Al and Si/Ni80Fe20/Al/Co/Al2O3/Ni80Fe20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.

KW - Magnetic thin films

KW - Multilayers

KW - Substrate bias

KW - Surface roughness

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UR - http://www.scopus.com/inward/citedby.url?scp=0036606821&partnerID=8YFLogxK

U2 - 10.1016/S0304-8853(02)00292-5

DO - 10.1016/S0304-8853(02)00292-5

M3 - Article

AN - SCOPUS:0036606821

SN - 0304-8853

VL - 247

SP - 339

EP - 344

JO - Journal of Magnetism and Magnetic Materials

JF - Journal of Magnetism and Magnetic Materials

IS - 3

ER -

Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

Abstract

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Keywords

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