Radio frequency substrate bias effect on properties of Co thin film and multilayer structures

V. Ng, J. F. Hu, A. O. Adeyeye, J. P. Wang, T. C. Chong

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni80Fe20 thin film as an underlayer. The surface roughness of Ni80Fe20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni80Fe20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni80Fe20/Al/Co/Al and Si/Ni80Fe20/Al/Co/Al2O3/Ni80Fe20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures.

Original languageEnglish (US)
Pages (from-to)339-344
Number of pages6
JournalJournal of Magnetism and Magnetic Materials
Volume247
Issue number3
DOIs
StatePublished - 2002

Keywords

  • Magnetic thin films
  • Multilayers
  • Substrate bias
  • Surface roughness

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