Radio-frequency reactively sputtered VO_x thin films deposited at different oxygen flows

Keyphrases

• Radio Frequency 100%
• Oxygen Flow 100%
• VOx Thin Films 100%
• Electrochromic Behavior 66%
• Coloring Materials 66%
• High-flow Oxygen 66%
• Oxides 33%
• X Ray Diffraction 33%
• Stoichiometry 33%
• Low Flow 33%
• Oxygen Flow Rate 33%
• Hydrogen Content 33%
• Lithium Insertion 33%
• Vanadium Pentoxide 33%
• As-deposited Films 33%
• Rutherford Backscattering Spectrometry 33%
• Lithium Intercalation 33%
• Spectrometry 33%
• Electrochromism 33%
• Reactive Sputter Deposition 33%
• Vanadium Oxide Thin Film 33%

Material Science

• Film 100%
• Thin Films 100%
• Lithium 40%
• Electrochromics 40%
• Oxide Compound 40%
• Amorphous Material 20%
• X-Ray Diffraction 20%
• Rutherford Backscattering Spectrometry 20%
• Vanadium 20%