Radio-frequency induction plasmas at atmospheric pressure: Mixtures of hydrogen, nitrogen, and oxygen with argon

S. L. Girshick, W. Yu

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

Numerical calculations are reported which simulate atmospheric-pressure radiofrequency induction plasmas consisting of either pure argon or mixtures of argon with hydrogen, nitrogen, or oxygen. These calculations are compared to observations of laboratory plasmas generated with the same geometry and run conditions. The major features of the laboratory plasmas are predicted well by the calculations: the pure argon plasma is the largest, with the argon-oxygen plasma slightly smaller. The argon-nitrogen plasma is considerably smaller and the argon-hydrogen plasma is the shortest, although somewhat fatter than the argon-nitrogen case. The calculations are not entirely successful in predicting the exact location of the plasmas relative to the coils. A likely explanation is that there is significant uncertainty regarding the actual power coupled to the laboratory plasmas.

Original languageEnglish (US)
Pages (from-to)515-529
Number of pages15
JournalPlasma Chemistry and Plasma Processing
Volume10
Issue number4
DOIs
StatePublished - Dec 1 1990

Keywords

  • Induction plasmas
  • gas mixtures
  • numerical modeling

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