Abstract
Growth, structural, and band alignment properties of pulsed laser deposited amorphous BaTiO3 on epitaxial molecular beam epitaxy grown (110)Ge layer, as well as their utilization in low power transistor are reported. High-resolution x-ray diffraction demonstrated quasi-zero lattice mismatch of BaTiO3 on (110)Ge. Cross-sectional transmission electron microscopy micrograph confirms the amorphous nature of BaTiO3 layer as well as shows a sharp heterointerface between BaTiO3 and Ge with no traceable interfacial layer. The valence band offset, ΔEv, of 1.99 ± 0.05 eV at the BaTiO3/(110)Ge heterointerface is measured using x-ray photoelectron spectroscopy. The conduction band offset, ΔEc, of 1.14 ± 0.1 eV is calculated using the bandgap energies of BaTiO3 of 3.8 eV and Ge of 0.67 eV. These band offset parameters for carrier confinement and the interface chemical properties of the BaTiO3/(110)Ge system are significant advancement towards designing Ge-based p-and n-channel metal-oxide semiconductor field-effect transistors for low-power application.
| Original language | English (US) |
|---|---|
| Article number | 024303 |
| Journal | Journal of Applied Physics |
| Volume | 114 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jul 14 2013 |
| Externally published | Yes |
Bibliographical note
Funding Information:The part of the work was supported by Intel Corporation. S.P. and D.M. would like to acknowledge the financial support from Office of Basic Science, Department of Energy, through Grant No. DE-FG02-06ER46290.