@inproceedings{0a2dc4ad47d24397a4715681e7ce2101,
title = "Quantum well nanomechanical actuators with atomic vertical resolution",
abstract = "A novel continuously tunable vertical actuator with sub-nanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum well surfaces. Deflections from -17 nm to 5 nm with a precision better than three atomic layers have been measured.",
keywords = "Microactuator, Microcantilever, Semiconductor heterostructure, Surface forces",
author = "Makowski, {Jan D.} and Talghader, {Joseph J}",
year = "2007",
doi = "10.1109/NANO.2007.4601158",
language = "English (US)",
isbn = "1424406080",
series = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings",
pages = "146--149",
booktitle = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings",
note = "2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 ; Conference date: 02-08-2007 Through 05-08-2007",
}