Pulsed laser deposition of AlN thin films

Y. F. Lu, Z. M. Ren, H. Q. Ni, Y. W. Goh, B. A. Cheong, S. K. Chow, J. P. Wang, T. C. Chong

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy