Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method

C. R. Cho; D. E. Drinkwater; L. F. Francis; D. L. Polla

doi:10.1016/S0167-577X(98)00147-5

Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method

C. R. Cho, D. E. Drinkwater, L. F. Francis, D. L. Polla

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

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Abstract

Lead scandium niobate titanate (Pb[Sc_1/2Nb_1/2)_0.57Ti_0.43]O ₃) thin films with 0.5 mol% Nb doping were prepared by a sol-gel method. Films annealed at temperatures greater than 600°C crystallized into a single phase perovskite structure. The films were transparent and crack-free with uniform thickness and an average grain size of 1.1 μm. The dielectric constant and dissipation factor measured at 1 kHz for a film annealed at 700°C were 1370 and 0.022, respectively. Ferroelectricity was confirmed by the presence of hysteresis loops, with a remanent polarization of 20 μC/cm² and coercive field of 35 kV/cm. The piezoelectric coefficient (d₃₃) of a poled film was 98 pm/V. Dielectric, ferroelectric, and piezoelectric properties of the films were enhanced through annealing and poling after deposition of the top gold electrode.

Original language	English (US)
Pages (from-to)	136-140
Number of pages	5
Journal	Materials Letters
Volume	38
Issue number	2
DOIs	https://doi.org/10.1016/S0167-577X(98)00147-5
State	Published - Jan 1999

Bibliographical note

Funding Information:
This work was supported by the Office Naval Research under Contract No. N00014-95-1-0539 and the Korea Science and Engineering Foundation (KOSEF). The use of facilities in the Center for Interfacial Engineering at the University of Minnesota is gratefully acknowledged. The authors wish to thank Prof. D.A. Payne in University of Illinois at Urbana-Champaign for useful discussions on solution preparation.

Keywords

68.55.Jk
77.65.Bn
77.84.-s
81.15.Lm
82.80.Pv
Lead scandium niobate titanate
Microelectromechanical systems
Piezoelectric coefficient
Sol-gel
Thin film

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title = "Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method",

abstract = "Lead scandium niobate titanate (Pb[Sc1/2Nb1/2)0.57Ti0.43]O 3) thin films with 0.5 mol% Nb doping were prepared by a sol-gel method. Films annealed at temperatures greater than 600°C crystallized into a single phase perovskite structure. The films were transparent and crack-free with uniform thickness and an average grain size of 1.1 μm. The dielectric constant and dissipation factor measured at 1 kHz for a film annealed at 700°C were 1370 and 0.022, respectively. Ferroelectricity was confirmed by the presence of hysteresis loops, with a remanent polarization of 20 μC/cm2 and coercive field of 35 kV/cm. The piezoelectric coefficient (d33) of a poled film was 98 pm/V. Dielectric, ferroelectric, and piezoelectric properties of the films were enhanced through annealing and poling after deposition of the top gold electrode.",

keywords = "68.55.Jk, 77.65.Bn, 77.84.-s, 81.15.Lm, 82.80.Pv, Lead scandium niobate titanate, Microelectromechanical systems, Piezoelectric coefficient, Sol-gel, Thin film",

author = "Cho, {C. R.} and Drinkwater, {D. E.} and Francis, {L. F.} and Polla, {D. L.}",

note = "Funding Information: This work was supported by the Office Naval Research under Contract No. N00014-95-1-0539 and the Korea Science and Engineering Foundation (KOSEF). The use of facilities in the Center for Interfacial Engineering at the University of Minnesota is gratefully acknowledged. The authors wish to thank Prof. D.A. Payne in University of Illinois at Urbana-Champaign for useful discussions on solution preparation. ",

year = "1999",

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doi = "10.1016/S0167-577X(98)00147-5",

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T1 - Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method

AU - Cho, C. R.

AU - Drinkwater, D. E.

AU - Francis, L. F.

AU - Polla, D. L.

N1 - Funding Information: This work was supported by the Office Naval Research under Contract No. N00014-95-1-0539 and the Korea Science and Engineering Foundation (KOSEF). The use of facilities in the Center for Interfacial Engineering at the University of Minnesota is gratefully acknowledged. The authors wish to thank Prof. D.A. Payne in University of Illinois at Urbana-Champaign for useful discussions on solution preparation.

PY - 1999/1

Y1 - 1999/1

N2 - Lead scandium niobate titanate (Pb[Sc1/2Nb1/2)0.57Ti0.43]O 3) thin films with 0.5 mol% Nb doping were prepared by a sol-gel method. Films annealed at temperatures greater than 600°C crystallized into a single phase perovskite structure. The films were transparent and crack-free with uniform thickness and an average grain size of 1.1 μm. The dielectric constant and dissipation factor measured at 1 kHz for a film annealed at 700°C were 1370 and 0.022, respectively. Ferroelectricity was confirmed by the presence of hysteresis loops, with a remanent polarization of 20 μC/cm2 and coercive field of 35 kV/cm. The piezoelectric coefficient (d33) of a poled film was 98 pm/V. Dielectric, ferroelectric, and piezoelectric properties of the films were enhanced through annealing and poling after deposition of the top gold electrode.

AB - Lead scandium niobate titanate (Pb[Sc1/2Nb1/2)0.57Ti0.43]O 3) thin films with 0.5 mol% Nb doping were prepared by a sol-gel method. Films annealed at temperatures greater than 600°C crystallized into a single phase perovskite structure. The films were transparent and crack-free with uniform thickness and an average grain size of 1.1 μm. The dielectric constant and dissipation factor measured at 1 kHz for a film annealed at 700°C were 1370 and 0.022, respectively. Ferroelectricity was confirmed by the presence of hysteresis loops, with a remanent polarization of 20 μC/cm2 and coercive field of 35 kV/cm. The piezoelectric coefficient (d33) of a poled film was 98 pm/V. Dielectric, ferroelectric, and piezoelectric properties of the films were enhanced through annealing and poling after deposition of the top gold electrode.

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KW - Lead scandium niobate titanate

KW - Microelectromechanical systems

KW - Piezoelectric coefficient

KW - Sol-gel

KW - Thin film

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ER -

Properties of Nb-doped lead scandium niobate titanate thin films prepared by a sol-gel method

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