Properties of high-k/ultrahigh purity silicon nitride stacks

Keyphrases

• Silicon Nitride 100%
• Ultra-high Purity 100%
• Ammonia 25%
• Self-limiting 25%
• Vacuum Chamber 25%
• Ultra-high Vacuum 25%
• Nitrided Layer 25%
• Barrier Layer 25%
• High-k Material 25%
• Nitriding Temperature 25%
• Effective Charge number 25%
• Rapid Thermal Nitridation 25%

Material Science

• Silicon Nitride 100%
• Nitriding 100%
• Density 50%
• Nitride Compound 50%

Engineering

• Nitride 100%
• Nitride Layer 50%
• Effective Charge 50%
• Charge Density 50%
• Barrier Layer 50%