Abstract
This paper describes techniques for rapidly producing a carbon nanotube thin film by electrophoretic deposition at room temperature and determines the film mass density and electrical/mechanical properties of such films. The mechanism of electrophoretic deposition of thin layers is explained with experimental data. Also, film thickness is measured as a function of time, electrical field and suspension concentration. We use Rutherford backscattering spectroscopy to determine the film mass density. Films created in this manner have a resistivity of 2.14 × 10- 3 Ω·cm, a mass density that varies with thickness from 0.12 to 0.54 g/cm3, and a Young's modulus between 4.72 and 5.67 GPa. The latter was found to be independent of thickness from 77 to 134 nm. We also report on fabricating free-standing films by removing the metal seed layer under the CNT film, and selectively etching a sacrificial layer. This method could be extended to flexible photovoltaic devices or high frequency RF MEMS devices.
Original language | English (US) |
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Pages (from-to) | 278-285 |
Number of pages | 8 |
Journal | Thin Solid Films |
Volume | 589 |
DOIs | |
State | Published - Aug 31 2015 |
Bibliographical note
Publisher Copyright:© 2015 Elsevier B.V.
Keywords
- Carbon nanotube
- Characterization
- Electrophoretic deposition
- RBS
- Thin film