Properties of electrophoretically deposited single wall carbon nanotube films

Junyoung Lim, Maryam Jalali, Stephen A. Campbell

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


This paper describes techniques for rapidly producing a carbon nanotube thin film by electrophoretic deposition at room temperature and determines the film mass density and electrical/mechanical properties of such films. The mechanism of electrophoretic deposition of thin layers is explained with experimental data. Also, film thickness is measured as a function of time, electrical field and suspension concentration. We use Rutherford backscattering spectroscopy to determine the film mass density. Films created in this manner have a resistivity of 2.14 × 10- 3 Ω·cm, a mass density that varies with thickness from 0.12 to 0.54 g/cm3, and a Young's modulus between 4.72 and 5.67 GPa. The latter was found to be independent of thickness from 77 to 134 nm. We also report on fabricating free-standing films by removing the metal seed layer under the CNT film, and selectively etching a sacrificial layer. This method could be extended to flexible photovoltaic devices or high frequency RF MEMS devices.

Original languageEnglish (US)
Pages (from-to)278-285
Number of pages8
JournalThin Solid Films
StatePublished - Aug 31 2015

Bibliographical note

Funding Information:
We acknowledge the fabrication and characterization assistance at the Minnesota Nano Center and the Characterization Facility, University of Minnesota, which receives partial support from NNIN and NSF through the MRSEC program.

Publisher Copyright:
© 2015 Elsevier B.V.


  • Carbon nanotube
  • Characterization
  • Electrophoretic deposition
  • RBS
  • Thin film


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