Abstract
The structural, optical, and electrical properties of amorphous multilayer films containing up to 180 double layers of a-Si:H/a-SiNx and a-Si:H/a-SiOx were studied. For a-Si:H layer thickness d>100 A ̊ the transport properties are dominated by space-charge doping with a-SiNx positive and a-SiOx negatively charged. For d<50 A ̊ quantum-well effects increase the optical and electrical gaps. A d=12 A ̊ multilayer film shows no evidence for the predicted loss of extended states in two-dimensional disordered systems.
Original language | English (US) |
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Pages (from-to) | 339-344 |
Number of pages | 6 |
Journal | Journal of Non-Crystalline Solids |
Volume | 66 |
Issue number | 1-2 |
DOIs | |
State | Published - Jul 1984 |
Bibliographical note
Funding Information:layers offer the opportunity for studying the effect of high internal electric * Supported by NSF DMR 8009225 and Energy Conversion Devices, Inc. + Bell Labs. Ph.D. Scholar. t Toshiba Corp. Fellow; present address - Toshiba Electron Device Eng. Lab. Yokohama, Japan.