Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers

George E. Ponchak; Isaac K. Itotia; Rhonda R Franklin

doi:10.1109/EUMC.2003.1262214

Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers

George E. Ponchak
, Isaac K. Itotia
, Rhonda R Franklin

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

Measured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 Ω-cm Si substrate with a 23 μm thick, 68% porous Si layer and a 20 μm thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.

Original language	English (US)
Title of host publication	Conference Proceedings - 33rd European Microwave Conference, EuMC 2003
Publisher	IEEE Computer Society
Pages	45-48
Number of pages	4
Volume	1
ISBN (Print)	1580538347, 9781580538343
DOIs	https://doi.org/10.1109/EUMC.2003.1262214
State	Published - Jan 1 2003
Event	33rd European Microwave Conference, EuMC 2003 - Munich, Germany Duration: Oct 7 2003 → Oct 7 2003

Other

Other	33rd European Microwave Conference, EuMC 2003
Country/Territory	Germany
City	Munich
Period	10/7/03 → 10/7/03

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10.1109/EUMC.2003.1262214

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Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers. / Ponchak, George E.; Itotia, Isaac K.; Franklin, Rhonda R.
Conference Proceedings - 33rd European Microwave Conference, EuMC 2003. Vol. 1 IEEE Computer Society, 2003. p. 45-48 1262214.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ponchak, GE, Itotia, IK & Franklin, RR 2003, Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers. in Conference Proceedings - 33rd European Microwave Conference, EuMC 2003. vol. 1, 1262214, IEEE Computer Society, pp. 45-48, 33rd European Microwave Conference, EuMC 2003, Munich, Germany, 10/7/03. https://doi.org/10.1109/EUMC.2003.1262214

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abstract = "Measured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 Ω-cm Si substrate with a 23 μm thick, 68\% porous Si layer and a 20 μm thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.",

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AU - Ponchak, George E.

AU - Itotia, Isaac K.

AU - Franklin, Rhonda R

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Y1 - 2003/1/1

N2 - Measured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 Ω-cm Si substrate with a 23 μm thick, 68% porous Si layer and a 20 μm thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.

AB - Measured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 Ω-cm Si substrate with a 23 μm thick, 68% porous Si layer and a 20 μm thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.

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UR - https://www.scopus.com/pages/publications/84897541113#tab=citedBy

U2 - 10.1109/EUMC.2003.1262214

DO - 10.1109/EUMC.2003.1262214

M3 - Conference contribution

AN - SCOPUS:84897541113

SN - 1580538347

SN - 9781580538343

VL - 1

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BT - Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

PB - IEEE Computer Society

T2 - 33rd European Microwave Conference, EuMC 2003

Y2 - 7 October 2003 through 7 October 2003

ER -

Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers

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