Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers

George E. Ponchak, Isaac K. Itotia, Rhonda R Franklin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

Measured and modeled propagation characteristics of Finite Ground Coplanar (FGC) waveguide fabricated on a 15 Ω-cm Si substrate with a 23 μm thick, 68% porous Si layer and a 20 μm thick polyimide interface layer are presented for the first time. Attenuation and effective permittivity as function of the FGC geometry and the bias between the center conductor and the ground planes are presented. It is shown that the porous Si reduces the attenuation by 1 dB/cm compared to FGC lines with only polyimide interface layers, and the polyimide on porous silicon demonstrates negligible bias dependence.

Original languageEnglish (US)
Title of host publicationConference Proceedings - 33rd European Microwave Conference, EuMC 2003
PublisherIEEE Computer Society
Pages45-48
Number of pages4
Volume1
ISBN (Print)1580538347, 9781580538343
DOIs
StatePublished - Jan 1 2003
Event33rd European Microwave Conference, EuMC 2003 - Munich, Germany
Duration: Oct 7 2003Oct 7 2003

Other

Other33rd European Microwave Conference, EuMC 2003
CountryGermany
CityMunich
Period10/7/0310/7/03

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  • Cite this

    Ponchak, G. E., Itotia, I. K., & Franklin, R. R. (2003). Propagation characteristics of finite ground coplanar waveguide on Si substrates with porous Si and polyimide interface layers. In Conference Proceedings - 33rd European Microwave Conference, EuMC 2003 (Vol. 1, pp. 45-48). [1262214] IEEE Computer Society. https://doi.org/10.1109/EUMC.2003.1262214